By Minhang Bao
Sensors and actuators are actually a part of our daily life and seem in lots of home equipment, similar to vehicles, merchandising machines and washing machines. MEMS (Micro Electro Mechanical structures) are micro platforms inclusive of micro mechanical sensors, actuators and micro digital circuits. a number of MEMS units were constructed and plenty of mass produced, however the details on those is broadly dispersed within the literature. This e-book offers the research and layout rules of MEMS units. the knowledge is complete, concentrating on microdynamics, reminiscent of the mechanics of beam and diaphragm buildings, air damping and its impression at the movement of mechanical buildings. utilizing useful examples, the writer examines difficulties linked to research and layout, and strategies are incorporated in the back of the publication. the right complicated point textbook for graduates, Analysis and layout ideas of MEMS Devices is an acceptable resource of reference for researchers and engineers within the box.
* provides the research and layout rules of MEMS units extra systematically than ever before.
* comprises the theories crucial for the research and layout of MEMS comprises the dynamics of micro mechanical structures
* an issue part is integrated on the finish of every bankruptcy with solutions supplied on the finish of the booklet.
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Additional resources for Analysis and Design Principles of MEMS Devices
Angell, A batch-fabricated silicon accelerometer, IEEE Trans, on Electron Devices, Vol. 8. Analysis and Design Principles of MEMS Devices 31  P. W. Barth, F. Pourahmadi, R. Mayer, J. Poydock, K. E. Petersen, A monolithic accelerometer with integrated air damping and overrange protection, Proc. of IEEE SolidState Sensor and Actuator Workshop, Hilton Head Island, SC, USA, June 6-9, 1988, 35-38  J. Starr, Squeeze-film damping in solid-state accelerometers, Proc. of IEEE SolidState Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 1990, 44-47  H.
A coordinate system is taken with its origin at the center of a cross section and the x-axis along the beam. The z-axis is in the thickness direction of the beam and downward, as shown in Fig. 1. If the beam is bent in the x-z plane in an upward direction on both ends due to the bending moment, M, as shown in Fig. 2, the top (the concave side) of the beam is compressed and the bottom (the convex side) of the beam is stretched. There is a neutral plane somewhere in between which is neither stretched nor compressed by the bending.
Petersen, A monolithic accelerometer with integrated air damping and overrange protection, Proc. of IEEE SolidState Sensor and Actuator Workshop, Hilton Head Island, SC, USA, June 6-9, 1988, 35-38  J. Starr, Squeeze-film damping in solid-state accelerometers, Proc. of IEEE SolidState Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 1990, 44-47  H. Chen, S. Shen, M. Bao, Over-range capacity of a piezoresistive microaccelerometer, Sensors and Actuators A58 (1997) 197-201  S.
Analysis and Design Principles of MEMS Devices by Minhang Bao